JPH0167737U - - Google Patents
Info
- Publication number
- JPH0167737U JPH0167737U JP1987162367U JP16236787U JPH0167737U JP H0167737 U JPH0167737 U JP H0167737U JP 1987162367 U JP1987162367 U JP 1987162367U JP 16236787 U JP16236787 U JP 16236787U JP H0167737 U JPH0167737 U JP H0167737U
- Authority
- JP
- Japan
- Prior art keywords
- etched
- reaction chamber
- showing
- exciting
- surround
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987162367U JPH0167737U (en]) | 1987-10-22 | 1987-10-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987162367U JPH0167737U (en]) | 1987-10-22 | 1987-10-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0167737U true JPH0167737U (en]) | 1989-05-01 |
Family
ID=31446126
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987162367U Pending JPH0167737U (en]) | 1987-10-22 | 1987-10-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0167737U (en]) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58911A (ja) * | 1981-06-18 | 1983-01-06 | ロレアル | 染色組成物およびその酸化防止法 |
| JPS58151028A (ja) * | 1982-01-26 | 1983-09-08 | マテリアルズ・リサ−チ・コ−ポレ−シヨン | 磁気的に強められたプラズマ処理方法および装置 |
| JPS63186429A (ja) * | 1987-01-29 | 1988-08-02 | Oki Electric Ind Co Ltd | ドライプロセス装置 |
-
1987
- 1987-10-22 JP JP1987162367U patent/JPH0167737U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58911A (ja) * | 1981-06-18 | 1983-01-06 | ロレアル | 染色組成物およびその酸化防止法 |
| JPS58151028A (ja) * | 1982-01-26 | 1983-09-08 | マテリアルズ・リサ−チ・コ−ポレ−シヨン | 磁気的に強められたプラズマ処理方法および装置 |
| JPS63186429A (ja) * | 1987-01-29 | 1988-08-02 | Oki Electric Ind Co Ltd | ドライプロセス装置 |